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About:
Computational lithography
An Entity of Type:
Thing
,
from Named Graph:
http://dbpedia.org
,
within Data Space:
dbpedia-live.demo.openlinksw.com
Algorithmic approaches to improving resolution in photolithography
Property
Value
dbo:
description
atgorismes de litografia
(ca)
algorithmic approaches to improving resolution in photolithography
(en)
dbo:
wikiPageWikiLink
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dbr
:Optical_proximity_correction
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:Extreme_ultraviolet_lithography
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dct:
subject
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gold:
hypernym
dbr
:Set
rdfs:
label
Computational lithography
(en)
owl:
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primaryTopic
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