About: Radio-frequency microelectromechanical system

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dbo:thumbnail	wiki-commons:Special:FilePath/RF_MEMS.png?width=300
dbo:wikiPageExternalLink	http://www.cambridge.org/gb/knowledge/isbn/item2710256/%3Fsite_locale=en_GB
dbo:wikiPageWikiLink	dbr:Signal-to-noise_ratio dbr:Interference_(communication) dbr:Choke_(electronics) dbr:Transmission_line dbr:Rockwell_International dbr:Self-sustainability dbr:Biasing dbr:Insertion_loss dbr:Residual_stress dbr:Monolithic_microwave_integrated_circuit dbr:Boltzmann_constant dbr:DBi dbr:Inductor dbr:Temperature dbr:Bandwidth_(signal_processing) dbr:Beamforming dbr:Radar dbr:Phased_array dbr:Noise_figure dbr:Fractal_antenna dbr:Phase_noise dbr:Vacuum_tube dbr:Shunt_(electrical) dbr:Bending dbr:Ohmic_contact dbr:Electronic_component dbr:Frequency dbr:Polymer dbr:Sapphire dbr:Active_electronically_scanned_array dbr:Passivation_(chemistry) dbr:Surface_roughness dbr:Malibu,_California dbr:Electroplating dbr:Radio-on-a-chip dbr:Microwave_cavity dbr:Frequency_mixer dbr:Dynamic_range dbr:Waveform dbr:Band-pass_filter dbr:Samsung_Omnia_W dbr:Phase_shift_module dbr:Dicing dbr:Passive_electronically_scanned_array dbr:Analog_Devices dbr:Software-defined_radio dbr:Picosecond dbr:Boston dbr:California dbr:Massachusetts dbr:Silicon dbr:Texas dbr:Water dbr:Ku_band dbr:Soldering dbr:Impedance_matching dbr:Microelectromechanical_system_oscillator dbr:Switched_capacitor dbr:Photolithography dbr:Ka_band dbr:Electronic_tuner dbr:Beam_(structure) dbr:Electronic_packaging dbc:Microelectronic_and_microelectromechanical_systems dbr:Microfabrication dbr:Organic_compound dbr:PIN_diode dbr:Young's_modulus dbr:Filter_bank dbr:Cantilever dbr:Dallas dbr:San_Jose,_California dbr:Northeastern_University dbr:Acoustics dbr:Adhesive dbr:Femtofarad dbr:Welding dbr:Indium_phosphide dbr:Surface_acoustic_wave dbr:Tantalum_nitride dbr:Van_der_Waals_force dbr:Power_supply dbr:Low_noise_amplifier dbr:Low_temperature_co-fired_ceramic dbr:Ceramic dbr:Engine dbr:Quartz dbr:Direct_current dbr:Raytheon dbr:Magnetostatics dbr:Yttrium_iron_garnet dbr:Non-return-to-zero dbr:Hermetic_seal dbr:IBM_Research dbr:Selectivity_(radio) dbr:Spiral_antenna dbr:Common_gate dbr:Linearity dbr:Clamp_(tool) dbr:Slot_antenna dbr:CMOS dbr:Dielectric dbr:Lead_zirconate_titanate dbr:Thin_film dbr:Ferrite_(magnet) dbr:Frit dbr:Gain_(electronics) dbr:Ultra-wideband dbr:Thin_film_bulk_acoustic_resonator dbr:Milliwatt dbr:Watt dbr:Q_factor dbr:Circuit_reliability dbr:Switching_time dbr:GHz dbr:Multi-band dbr:Dielectric_constant dbr:Sierpinski_gasket dbr:Radar_cross-section dbr:Reflective_array_antenna dbr:Reconfigurable_antenna dbr:Thousand_Oaks dbr:X-band dbr:Switches dbr:Hughes_Research_Laboratories dbr:Eutectic dbr:Frequency_band dbr:File:RF_MEMS.png dbr:File:RF_MEMS_BIASING.png dbr:File:RF_MEMS_EIRP_TIMES_GT_VERSUS_N_1.png dbr:File:RF_MEMS_EIRP_VERSUS_N.png dbr:File:RF_MEMS_FABRICATION_PROCESS.png dbr:File:RF_MEMS_PACKAGING.png dbr:File:RF_MEMS_RELIABILITY.png dbr:Piezoelectric dbr:Millimeter-wave dbr:Lens_(optics) dbr:GaAs dbr:GaN dbr:FET dbr:Radio-frequency dbr:Antenna_efficiency dbr:Varactor dbr:Waveguide_(electromagnetism) dbr:Microelectromechanical_systems dbr:Focal_plane dbr:Out-of-band_data dbr:SiC dbr:Compound_semiconductor dbr:Molecular_beam_epitaxy dbr:Electrostatic_force dbr:Wafer-level_Packaging dbr:Critical_point_drying dbr:Large-scale_integration dbr:Effective_isotropically_radiated_power dbr:Electron_beam_lithography dbr:Electrostatic dbr:Moult dbr:Optical_lithography dbr:Barium_strontium_titanate dbr:Ferroelectric dbr:Liquid_crystal_polymer dbr:Bandpass_filter dbr:Beam_squint dbr:Metal_organic_chemical_vapor_deposition dbr:Power_consumption dbr:Power_handling dbr:Series_circuits dbr:SiGe dbr:Thermal_expansion_coefficient dbr:Conductive dbr:Contaminant dbr:Changeover_switch dbr:Damped_spring-mass_system dbr:Capacitive dbr:Failure_modes_of_electronics dbr:Fused_silica dbr:Dihedral_(aircraft) dbr:Droplet dbr:Radar_equation dbr:Radio_Frequency_Integrated_Circuit dbr:HEMT dbr:Anodic dbr:Clean_rooms dbr:Loss_tangent dbr:Sacrificial dbr:InSb dbr:Resonant_frequency dbr:Resonators dbr:Mie_theory dbr:Poisson_ratio dbr:Wikt:wobble dbr:Spring_constant dbr:File:RF_MEMS_EIRP_TIMES_GT_VERSUS_N_2.png
dbp:wikiPageUsesTemplate	dbt:Reflist dbt:Anchor dbt:ISBN dbt:About dbt:Technical
dct:subject	dbc:Microelectronic_and_microelectromechanical_systems
rdfs:label	Radio-frequency microelectromechanical system (en)
owl:sameAs	wikidata:Radio-frequency microelectromechanical system dbpedia-global:Radio-frequency microelectromechanical system dbr:Radio-frequency microelectromechanical system
prov:wasDerivedFrom	wikipedia-en:Radio-frequency_microelectromechanical_system?oldid=1291648095&ns=0
foaf:depiction	wiki-commons:Special:FilePath/RF_MEMS.png wiki-commons:Special:FilePath/RF_MEMS_BIASING.png wiki-commons:Special:FilePath/RF_MEMS_EIRP_TIMES_GT_VERSUS_N_1.png wiki-commons:Special:FilePath/RF_MEMS_EIRP_TIMES_GT_VERSUS_N_2.png wiki-commons:Special:FilePath/RF_MEMS_EIRP_VERSUS_N.png wiki-commons:Special:FilePath/RF_MEMS_FABRICATION_PROCESS.png wiki-commons:Special:FilePath/RF_MEMS_PACKAGING.png wiki-commons:Special:FilePath/RF_MEMS_RELIABILITY.png
foaf:isPrimaryTopicOf	wikipedia-en:Radio-frequency_microelectromechanical_system
is dbo:academicDiscipline of	dbr:Benjamin_S._Cook dbr:Dimitrios_Peroulis
is dbo:wikiPageRedirects of	dbr:Radio_frequency_microelectromechanical_system dbr:RF_MEMS dbr:RF_MEMS dbr:RF-MEMS dbr:RF_MEMS_switch dbr:MEMS_switch
is dbo:wikiPageWikiLink of	dbr:Reconfigurable_antenna dbr:Rodica_Ramer dbr:Radio_frequency_microelectromechanical_system dbr:RF_MEMS dbr:RF-MEMS dbr:RF_MEMS_switch dbr:MEMS_switch
is rdfs:seeAlso of	dbr:Mechanical_filter
is foaf:primaryTopic of	wikipedia-en:Radio-frequency_microelectromechanical_system