About: Spacer patterning

An Entity of Type: Thing, from Named Graph: http://dbpedia.org, within Data Space: dbpedia-live.demo.openlinksw.com

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Property	Value
dbo:thumbnail	wiki-commons:Special:FilePath/Spacer_Patterning.jpg?width=300
dbo:wikiPageWikiLink	dbr:Flash_memory dbr:Multiple_patterning dbr:Immersion_lithography dbr:MOSFET dbc:Lithography_(microfabrication) dbr:Lithography dbr:Silicon_nitride dbr:Gate_oxide dbr:14_nm dbr:10_nm dbr:File:Spacer_Patterning.JPG dbr:File:Spacer_trimming.png
dbp:wikiPageUsesTemplate	dbt:Reflist dbt:Short_description
dct:subject	dbc:Lithography_(microfabrication)
gold:hypernym	dbr:Technique
rdfs:label	Spacer patterning (en)
owl:sameAs	wikidata:Spacer patterning dbpedia-global:Spacer patterning dbr:Spacer patterning
prov:wasDerivedFrom	wikipedia-en:Spacer_patterning?oldid=1188814362&ns=0
foaf:depiction	wiki-commons:Special:FilePath/Spacer_Patterning.jpg wiki-commons:Special:FilePath/Spacer_trimming.png
foaf:isPrimaryTopicOf	wikipedia-en:Spacer_patterning
is dbo:wikiPageWikiLink of	dbr:Multiple_patterning
is foaf:primaryTopic of	wikipedia-en:Spacer_patterning

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